The Supermag®'s agnetically levitated flat hollow rotor features an ingenious hollow design that significantly saves space, allowing for more flexible structural layout in the central area. Its flat design not only ensures structural stability but also easily supports large-diameter wafers, meeting the demands of various high-end applications. Moreover, the rotor can levitate freely within a metallic vacuum chamber, where it is precisely controlled by an external stator. This setup achieves efficient and stable operation, demonstrating its excellent performance and broad application prospects.

The Supermag®'s magnetically levitated impeller features an optimized structural design that reduces impact losses at the blade inlet of the pump head, improving the flow field and reducing turbulence. This results in lower energy losses within the pump, enhancing both the head and overall efficiency of the maglev pump system. Additionally, it increases efficiency under non-design conditions and improves the impeller's adaptability to flow fluctuations.

The Supermag® 's impeller features specially designed winglets. These winglets on the blades are engineered to adjust axial forces by generating a counteracting force. This design prevents axial displacement, which can lead to rotor damage, while also enhancing the mechanical strength of the blades. This not only extends the lifespan of the impeller but also reduces operational costs.

The Supermag®'s magnetically levitated six-degree-of-freedom rotor operates with high reliability and low vibration, enabling ultra-high vacuum environments. In the molecular flow region, gas molecules collide with the high-speed rotor blade surfaces, transferring momentum to the gas molecules. This causes some gas molecules to move in the direction of the rotor's surface, expelling them from the pump and achieving the evacuation purpose.