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High Cleanliness Rotary Motion
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The Supermag® SCM Maglev Wafer Rotation System is designed for wafer support and rotation in semiconductor equipment. Utilizing advanced magnetic levitation bearing and motor integrated control technology, it surpasses long-standing foreign technological monopolies, with several parameters exceeding international standards. The rotor levitates and rotates without friction, dynamic seals, or particle generation, making it ideal for high-end chip manufacturing processes. These processes include oxidation, diffusion and annealing, rapid thermal processing (RTP), rapid thermal annealing (RTA), rap
Product Highlights
Product Series
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Product Highlights
No Mechanical Friction， No Dynamic Seals， No Lubricants Required
Magnetic Levitation Support, Hollow Rotor, Clean and Reliable.
Integrated Magnetic Levitation and Motor Control
Featuring advanced control software, our system supports remote tuning support and seamless communication with upper-level systems such as PLCs and PCs. It is compatible with all Supermag® motor models.
Adjustable Speed and Precise Control
Speed Range: 20-2500 RPM for precise control.
Fully Independently Developed, Customizable
International patents， Customizable to meet semiconductor process requirements.
Auto Zero Position and Adjustable Height
Designed to meet the rigorous demands of semiconductor process inspections.
Compatible with Various Wafer Sizes
Suitable for inspecting 6", 8", and 12" wafers.
SCM Maglev Wafer Rotation System Product Series
Parameters and Features
Parameter Specifications：
Product Q&A Videos:
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SCM Maglev Wafer Rotation System_Leaflet
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